{"paper":{"title":"PORT: A piezoelectric optical resonance tuner","license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","headline":"","cross_cats":["physics.optics"],"primary_cat":"physics.app-ph","authors_text":"Bin Dong, Hao Tian, Michael Zervas, Sunil A. Bhave, Tobias J. Kippenberg","submitted_at":"2019-03-20T12:31:27Z","abstract_excerpt":"This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60 V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q optical of 64,000 across the entire tuning range. The first "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1903.08479","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}