{"paper":{"title":"Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators","license":"http://creativecommons.org/publicdomain/zero/1.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Arnaud Weck, Chang Zhang, David Girard, Francis Doyon-D'Amour, Mathis Turgeon-Roy, Mohammed Shakir, Raphael St-Gelais, Timothy Hodges, Yahya Saleh, Zachary Louis-Seize","submitted_at":"2025-07-24T17:31:59Z","abstract_excerpt":"Research on silicon nitride (SiN) nanomechanical resonators produces an exceptionally rich variety of resonator geometries, for which there is currently no available rapid prototyping solution. Experimental advances in nanobeam, trampoline, phononic bandgap, and soft-clamping structures all rely on conventional nanofabrication involving e-beam or photolithography, followed by various etching steps. These techniques are typically time-consuming, relatively inflexible, and often result in spurious residual SiN overhang that can degrade mechanical quality factors. In contrast, recent work has sho"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2507.18599","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2507.18599/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}