{"paper":{"title":"Bayesian Localization and Uncertainty Quantification of Trace Species in Two-Dimensional SIMS Imaging","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.chem-ph","authors_text":"Binsheu Shieh, Ichiro Akai, Masahiro Hara, Masao Yoshioka, Mengchi Wang, Takeshi Hashishin, Toru Aonishi","submitted_at":"2026-08-09T05:30:26Z","abstract_excerpt":"To enable accurate localization of trace species on material surfaces, we propose a Bayesian framework for analyzing two-dimensional (2D) secondary ion mass spectrometry (SIMS) imaging data. SIMS is widely used in semiconductor manufacturing, materials science, geology, environmental science, and life sciences because of its high sensitivity and excellent elemental and isotopic specificity. However, precise localization remains challenging because of primary ion beam broadening, overlap between neighboring ion distributions, and limited ion counts. The underlying distribution of trace species "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.08495","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.08495/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}