{"paper":{"title":"Scaling NbTiN-based ac-powered Josephson digital to 400M devices/cm$^2$","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Ankit Pokhrel, Anna Herr, Anne-Marie Valente-Feliciano, Blake Hodges, Katja Nowack, Min-Soo Kim, Quentin Herr, Ruiheng Bai, Sabine ONeal, Steve Brebels, Trent Josephsen, Zsolt T\\\"okei","submitted_at":"2023-03-29T15:32:25Z","abstract_excerpt":"We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$\\kappa$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device density, efficient routing, and AC power distribution on a resonant network. The materials scale beyond 28nm lithography and are compatible with standard high-temperature CMOS processes. We report initial results for two-metal layer NbTiN wires with 50nm critical dimension. A semi-ascendance wire-and-via process module using 193i lithography and 50nm critica"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2303.16792","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2303.16792/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}