{"paper":{"title":"Compact superconducting microwave resonators based on Al-AlOx-Al capacitor","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"quant-ph","authors_text":"Akiyoshi Tomonaga, Alexander Semenov, Ivan Khrapach, Jaw-Shen Tsai, Julia Zotova, Oleg Astafiev, Rui Wang, Yu Zhou","submitted_at":"2022-03-17T20:11:53Z","abstract_excerpt":"We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\\mathrm{Al/AlO_x/Al}$) parallel-plate capacitors. The size of the resonators is only 0.04~$\\mathrm{mm^2}$, which is more than one order smaller than the typical size of coplanar resonators (1~$\\mathrm{mm^2}$). The fabrication method we developed easily fits into the standard superconducting qubits fabrication process. We have obtained capacitance per area 14~fF/$\\mathrm{\\mu m^2}$ and the internal quality"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2203.09592","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2203.09592/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}