{"paper":{"title":"Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.optics","quant-ph"],"primary_cat":"physics.app-ph","authors_text":"Antonio Borrielli, Antonio Pontin, Bruno Morana, Enrico Serra, Francesco Marin, Giovanni Andrea Prodi, Gregory Pandraud, Michele Bonaldi, Pasqualina M. Sarro","submitted_at":"2018-06-29T16:15:12Z","abstract_excerpt":"Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this work we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an integrated on-chip 3D seismic filter properly designed to reduce mechanical losses. This oscillator works in the 200 kHz - 5 MHz range and features a mechanical quality factor of $Q\\simeq10^7$ and a Q-frequency product in excess of $6.2 \\times 10^{12}$ Hz at room"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1806.11513","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}