{"paper":{"title":"The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films for hot slumping technology","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Mingwu Wen, Shuang Ma, Zhanshan Wang","submitted_at":"2015-09-29T10:13:31Z","abstract_excerpt":"The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films were studied in this paper. Several types of adhesion layers were investigated: 10.0 nm Pt, 1.5 nm Cr+50.0 nm Pt, 2.5 nm Cr+50.0 nm Pt and 3.5 nm Cr+50.0 nm Pt fabricated using direct current magnetron sputtering. The variation of layer thicknesses, roughness, crystallization and surface topography of Pt/Cr films have been analyzed by grazing incidence X-ray reflectometry, large angle X-ray diffraction and the optical profiler before and after heating. 2.5 nm Cr+50.0 nm Pt films exhibit the best thermal "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1509.08673","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}