{"paper":{"title":"Atomic Layer Deposited Protective Coating of Aluminum Oxide on Silver-based Telescope Mirror A Comparison Between a Pure Ozone and H2O Precursor","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"astro-ph.IM","authors_text":"Andrew C. Phillips, Brandon Cheney, Brian Dupraw, Nobuhiko P. Kobayashi, S{\\o}ren A. Torn{\\o}e, Takayuki Hagiwara, Tetsuya Nishiguchi, Yoshimasa Okamura","submitted_at":"2023-05-09T00:44:29Z","abstract_excerpt":"Although silver-based telescope mirrors excel over other materials such as gold and aluminum in the visible-infrared spectral range, they require robust protective coatings to overcome their inherent low durability. Our research shows that a single-layer of aluminum oxide (AlOx) deposited through thermal atomic layer deposition (ALD) using trimethylaluminum (TMA) and water (H2O) at low temperatures (~60{\\deg}C) serves as an acceptable protective coating without adversely impacting the optical performance of the mirrors. While silver-based mirrors protected with a single-layer of AlOx perform d"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2305.05109","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2305.05109/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}