{"paper":{"title":"Fast Characterization of Moving Samples with Nano-Textured Surfaces","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"J{\\o}rgen Garn{\\ae}s, Maksim Zalkovskij, Mirza Karamehmedovi\\'c, Morten Hannibal Madsen, Poul-Erik Hansen","submitted_at":"2015-01-23T13:21:43Z","abstract_excerpt":"We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acquisition and analyzing time for the topological parameters height, width, and sidewall angle is only a few milliseconds of a grating. We demonstrate that the microscope has a resolution in the nanometer range, also in an environment with many vibrations, such as a machine floor. Furthermore, we demonstrate an easy method to find the area of interest with the integrated CCD camera."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1501.05793","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}