{"paper":{"title":"Towards Large Scale Atomic Manufacturing: Heterodyne Grating Interferometer with Zero Dead-Zone","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cs.SY","eess.SY"],"primary_cat":"physics.optics","authors_text":"Can Cui, Guangyao Huang, Lifu Liu, Linbin Luo, Lvye Gao, Menghan Yang, Pengbo Zhao, Shengtong Wang, Xinghui Li, Yu Ma","submitted_at":"2024-10-16T02:46:11Z","abstract_excerpt":"This paper presents a novel heterodyne grating interferometer designed to meet the precise measurement requirements of next-generation lithography systems and large-scale atomic-level manufacturing. Utilizing a dual-frequency light source, the interferometer enables simultaneous measurement of three degrees of freedom. Key advancements include a compact zero Dead-Zone optical path configuration, significantly enhancing measurement reliability by mitigating the impact of light source fluctuations and air refractive index variations. A comprehensive crosstalk error analysis was conducted, result"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2410.12177","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2410.12177/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}