{"paper":{"title":"Roadmap for focused ion beam technologies","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"physics.ins-det","authors_text":"Anne Delobbe, Arkady V. Krasheninnikov, Armin G\\\"olzh\\\"auser, Dieter Koelle, Florian Vollnhals, Flyura Djurabekova, Francesc P\\'erez-Murano, Frances I. Allen, Gemma Rius, Gerhard Hobler, Gregor Hlawacek, Ingo Manke, Ivo Utke, Johann Michler, Jos\\'e Mar{\\i}a De Teresa, Katja H\\\"oflich, Lisa McElwee-White, Lothar Bischoff, Mariachiara Manoccio, Markus Osenberg, Matthias Schmidt, Natalie Frese, Nico Klingner, Oleksandr V. Dobrovolskiy, Olivier De Castro, Patrick Philipp, Paul Mazarov, Peter Dunne, Philip Moll, Rosa C\\'ordoba, Tom Wirtz, Wolfhard M\\\"oller","submitted_at":"2023-05-31T07:59:05Z","abstract_excerpt":"The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2305.19631","kind":"arxiv","version":3},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2305.19631/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}