{"paper":{"title":"Structural and magnetic properties of Co-N thin films deposited using magnetron sputtering at 523 K","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Anton Devishvili, Mukul Gupta, Neeraj Shukla, Nidhi Pandey, Rachana Gupta, Sujay Chakravarty","submitted_at":"2016-07-29T06:56:37Z","abstract_excerpt":"In this work, we studied cobalt nitride (Co-N) thin films deposited using a dc magnetron sputtering method at a substrate temperature (\\Ts) of 523\\,K. We find that independent of the reactive gas flow (\\pn) used during sputtering, the phases of Co-N formed at this temperature seems to be identical having N \\pat~$\\sim$5. This is contrary to Co-N phases formed at lower \\Ts. For \\Ts$\\sim$300\\,K, an evolution of Co-N phases starting from Co(N)$\\rightarrow$\\tcn$\\rightarrow$Co$_3$N$\\rightarrow$CoN can be seen as \\pn increases to 100\\p, whereas when the substrate temperature increases to 523\\,K, the "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1607.08701","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}