{"paper":{"title":"High-precision spectral tuning of micro and nanophotonic cavities by resonantly enhanced photoelectrochemical etching","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Aristide Lemaitre, Carmen Gomez, Christophe Baker, Eduardo Gil-Santos, Giuseppe Leo, Ivan Favero, Sara Ducci","submitted_at":"2015-11-19T14:44:55Z","abstract_excerpt":"We present a simple method to tune optical micro- and nanocavities with picometer precision in the resonant wavelength, corresponding to an effective sub atomic monolayer control of the cavity dimension. This is obtained through resonant photo-electrochemical etching, with in-situ monitoring of the optical spectrum. We employ this technique to spectrally align an ensemble of resonant cavities in a permanent manner, overcoming the dimension variability resulting from current nanofabrication techniques. In a device containing several resonators, each is individually addressed and tuned, with no "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1511.06186","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}