{"paper":{"title":"Record-High Electron Mobility and Controlled Low 10$^{15}$ cm$^{-3}$ Si-doping in (010) $\\beta$-Ga$_2$O$_3$ Epitaxial Drift Layers","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Anna Kallistova, Arkka Bhattacharyya, Carl Peterson, Kittamet Chanchaiworawit, Rachel Kahler, Saurav Roy, Sriram Krishnamoorthy, Steve Rebollo, Thomas E. Mates, Yizheng Liu","submitted_at":"2024-07-24T08:36:48Z","abstract_excerpt":"We report on metalorganic chemical vapor deposition (MOCVD) growth of controllably Si-doped 4.5 $\\mu$m thick $\\beta$-Ga$_2$O$_3$ films with electron concentrations in the 10$^{15}$ cm$^{-3}$ range and record-high room temperature Hall electron mobilities of up to 200 cm$^2$/V.s, reaching the predicted theoretical maximum room temperature mobility value for $\\beta$-Ga$_2$O$_3$. Growth of the homoepitaxial films was performed on Fe-doped (010) $\\beta$-Ga$_2$O$_3$ substrates at a growth rate of 1.9 $\\mu$m/hr using TEGa as the Gallium precursor. To probe the background electron concentration, an u"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2407.17089","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2407.17089/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}