{"paper":{"title":"Post Annealing Crystallization behavior of RF Sputtered Yttrium Iron Garnet thin films on Si/SiO2 patterned substrates","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Aleem Siddiqui, Maria Roman, Tito Busani","submitted_at":"2026-06-05T22:45:12Z","abstract_excerpt":"Yttrium Iron Garnet YIG (Y3Fe5O12), is a commonly used material for magnonic devices due to its crystal and chemical structure, which makes the material highly ferromagnetic and enables long-range magnon propagation. Magnonic devices were fabricated by depositing a 390 nm thick thin film of YIG, using low vacuum RF sputtering, on Si substrates with a 240 nm buffer layer of SiO2. Two sets of devices were used to study the effect of the Si/SiO2 interface on the YIG. The first set features patterned hole pairs on the SiO2, which was created using fluorine etching. Patterned samples were used as s"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.07886","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.07886/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}