{"paper":{"title":"Silicon photonic crystal cavities at near band-edge wavelengths","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["physics.optics"],"primary_cat":"physics.app-ph","authors_text":"Hee-Jin Lim, Jeroen Elzerman, John J. L. Morton, Salahuddin Nur","submitted_at":"2018-09-28T10:21:01Z","abstract_excerpt":"We demonstrate photonic crystal L3 cavities with resonant wavelength around 1.078 \\textmu m on undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons.\\enspace We have optimised a fabrication recipe using readily available process materials such as polymethyl methacrylate (PMMA) as a soft electron-beam mask and a Chemical Vapour Deposition (CVD) grown oxide layer as a hard mask. Our bilayer resist technique efficiently produces photonic crystal cavities with a quality factor ($Q$) of $\\sim 5,000$ at a wavelength of $1.078$ \\textmu m, measured"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1809.10947","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}