{"paper":{"title":"Nonlinear Modeling of MEMS Fixed-Fixed beams","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"physics.app-ph","authors_text":"Xi Luo","submitted_at":"2017-07-21T01:37:09Z","abstract_excerpt":"This dissertation presents a new coupled electro-mechanical model that is an improvement on the classical parallel-plate approximation. The model employs a hyperbolic function to account for the beam deformed shape and electrostatic field. Based on this, the model can accurately calculate the deflection of a fixed-fixed beam subjected to an applied voltage and the switch capacitance-voltage characteristics without using parallel-plate assumption. For model validation, the model solutions are compared with ANSYS finite element results and experimental data. It is found that the model works espe"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1708.07106","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}