{"paper":{"title":"In-situ correlative SEM/KPFM for semiconductor devices and 2D heterostructures","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["physics.app-ph","physics.ins-det"],"primary_cat":"cond-mat.mes-hall","authors_text":"Aleksandra Radenovic, Eveline. S Mayner, Georg E. Fantner, Marcos Penedo, Nahid Hosseini, Prabhu Prasad Swain","submitted_at":"2026-05-15T15:27:04Z","abstract_excerpt":"Correlative nanoscale surface characterization benefits from simultaneously measuring electronic and structural properties in the same environment, a capability that is essential for modern-day materials science and semiconductor failure analysis. In-situ AFM-SEM measurements facilitated by self-sensing cantilevers offer great potential here; however, they are limited due to their inherent capacitive crosstalk. Here, we demonstrate for the first time the in-situ implementation of single-pass heterodyne Kelvin probe force microscopy inside a scanning electron microscope, using piezo-resistive c"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2605.16062","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2605.16062/integrity.json","findings":[],"available":true,"detectors_run":[{"name":"ai_meta_artifact","ran_at":"2026-05-19T17:33:41.548524Z","status":"skipped","version":"1.0.0","findings_count":0},{"name":"claim_evidence","ran_at":"2026-05-19T16:41:55.519801Z","status":"completed","version":"1.0.0","findings_count":0}],"snapshot_sha256":"150d5df4a818fd5e12248051ec0571b8067a7c575831f7f49acbcf1033c420c2"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}