{"paper":{"title":"Scalable photonic crystal waveguides with 2 dB component loss","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Dun Mao, Feifan Wang, Hwaseob Lee, Thomas Kananen, Tiantian Li, Tingyi Gu, Yahui Xiao, Zi Wang","submitted_at":"2023-05-07T17:29:11Z","abstract_excerpt":"Periodic or gradient subwavelength structures are basic configurations of photonic crystals and metamaterials. The measured linear losses of those nanophotonic devices are well-beyond theoretical predictions. Nanofabrication related geometric inhomogeneity is considered as the primary cause of the deleterious performance. The deep-UV photolithography in CMOS foundry is a large-scale parallel processing, which can significantly suppress the random offsets and thus the optical linear loss. Here we demonstrate ultra-low loss photonic crystal waveguides with a multi-project wafer run through AIM p"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2305.04337","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2305.04337/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}