{"paper":{"title":"High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.ins-det","authors_text":"Cheng Li, Haijun Yang, Keith Riles, Tianxiang Chen","submitted_at":"2013-03-26T13:19:32Z","abstract_excerpt":"In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1303.6477","kind":"arxiv","version":8},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}