{"paper":{"title":"Modeling Growth and Plasma Oxygen Effects on Metal Purity in Platinum EBID","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"EBID platinum deposits follow a hindered exponential growth model tied to beam parameters, with oxygen plasma treatment increasing platinum purity by removing carbon.","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Alberto Bramati, Antonio Balena, Hanna Le Jeannic, Linda Piscopo, Marianna D'Amato","submitted_at":"2026-05-17T17:23:19Z","abstract_excerpt":"Electron Beam-Induced Deposition (EBID) enables site-specific nanofabrication but suffers from significant carbon contamination, limiting its applicability in plasmonics, nanoelectronics, and sensing. In this study, we investigate the relationship between EBID process parameters such as beam current, acceleration voltage, and dwell time, and the platinum-to-carbon composition of deposited nanostructures. Using Energy Dispersive X-Ray Spectroscopy (EDX), we establish a hindered exponential growth model that correlates deposit composition with fabrication conditions. To enhance metal purity, we "},"claims":{"count":4,"items":[{"kind":"strongest_claim","text":"Using EDX, we establish a hindered exponential growth model that correlates deposit composition with fabrication conditions. Post-treatment EDX analysis confirms a systematic increase in platinum content, while SEM inspection reveals nanostructure shrinkage due to carbon removal.","source":"verdict.strongest_claim","status":"machine_extracted","claim_id":"C1","attestation":"unclaimed"},{"kind":"weakest_assumption","text":"That EDX measurements accurately capture the true bulk platinum-to-carbon ratio without surface sensitivity artifacts or beam-induced changes during analysis, and that the observed shrinkage and purity gain result solely from selective carbon removal rather than platinum loss or redeposition.","source":"verdict.weakest_assumption","status":"machine_extracted","claim_id":"C2","attestation":"unclaimed"},{"kind":"one_line_summary","text":"Presents a hindered exponential growth model linking EBID parameters to deposit composition and demonstrates that 30 W plasma oxygen treatment for 30 minutes increases platinum content with nanostructure shrinkage.","source":"verdict.one_line_summary","status":"machine_extracted","claim_id":"C3","attestation":"unclaimed"},{"kind":"headline","text":"EBID platinum deposits follow a hindered exponential growth model tied to beam parameters, with oxygen plasma treatment increasing platinum purity by removing carbon.","source":"verdict.pith_extraction.headline","status":"machine_extracted","claim_id":"C4","attestation":"unclaimed"}],"snapshot_sha256":"27089e3bd1fa0ed44296c58895483213feceefe7529c6adc421610ac380cddf4"},"source":{"id":"2605.17551","kind":"arxiv","version":1},"verdict":{"id":"e82119c3-915a-4ecc-82d1-f923b36689d2","model_set":{"reader":"grok-4.3"},"created_at":"2026-05-19T22:27:08.560569Z","strongest_claim":"Using EDX, we establish a hindered exponential growth model that correlates deposit composition with fabrication conditions. Post-treatment EDX analysis confirms a systematic increase in platinum content, while SEM inspection reveals nanostructure shrinkage due to carbon removal.","one_line_summary":"Presents a hindered exponential growth model linking EBID parameters to deposit composition and demonstrates that 30 W plasma oxygen treatment for 30 minutes increases platinum content with nanostructure shrinkage.","pipeline_version":"pith-pipeline@v0.9.0","weakest_assumption":"That EDX measurements accurately capture the true bulk platinum-to-carbon ratio without surface sensitivity artifacts or beam-induced changes during analysis, and that the observed shrinkage and purity gain result solely from selective carbon removal rather than platinum loss or redeposition.","pith_extraction_headline":"EBID platinum deposits follow a hindered exponential growth model tied to beam parameters, with oxygen plasma treatment increasing platinum purity by removing carbon."},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2605.17551/integrity.json","findings":[],"available":true,"detectors_run":[{"name":"doi_title_agreement","ran_at":"2026-05-19T23:01:19.447504Z","status":"completed","version":"1.0.0","findings_count":0},{"name":"doi_compliance","ran_at":"2026-05-19T22:41:13.514182Z","status":"completed","version":"1.0.0","findings_count":0},{"name":"ai_meta_artifact","ran_at":"2026-05-19T21:33:23.606880Z","status":"skipped","version":"1.0.0","findings_count":0},{"name":"claim_evidence","ran_at":"2026-05-19T21:21:57.540719Z","status":"completed","version":"1.0.0","findings_count":0}],"snapshot_sha256":"68c8783a9708ae30643d781d3e4c3d49596abb5a983b86f163b7c0cba1a30e77"},"references":{"count":2,"sample":[{"doi":"","year":1994,"title":"Results 2.1. Influence of EBID Parameters on Pt Composition Figure 1A shows a SEM micrograph of the sample designed for EBID characterization. The sample consists of three 4 × 4 arrays of squares patte","work_id":"0a7b0f76-4c52-40ed-8dd6-33a2930b9ce9","ref_index":1,"cited_arxiv_id":"","is_internal_anchor":false},{"doi":"","year":2017,"title":"D. Belic, M. M. Shawrav, E. Bertagnolli, H. D. Wanzenboeck, Beilstein Journal of Nanotechnology 2017, 8, 2530. [15] M. H. Ervin, D. Chang, B. Nichols, A. Wickenden, J. Barry, J. Melngailis, Journal of","work_id":"30bf5157-290c-478a-a0e3-9e8bf7c95a11","ref_index":2,"cited_arxiv_id":"","is_internal_anchor":false}],"resolved_work":2,"snapshot_sha256":"28ea1884a44523377b3e9c1105ace54281671bde3c31138640226837485f7163","internal_anchors":0},"formal_canon":{"evidence_count":2,"snapshot_sha256":"2a37b81dc50e3a72cee10036bbd29f3e8bc806fa9aedd44b9ec3ca767e446494"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}