{"paper":{"title":"Demonstration of Si-doped Al-rich thin regrown Al(Ga)N films on AlN on sapphire templates with $\\gt10^{15}/cm^3$ free carrier concentration using close-coupled showerhead MOCVD reactor","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"physics.app-ph","authors_text":"Chirag Gupta, Guangying Wang, Mobinul Haque, Parthasarathy Seshadri, Ruixin Bai, Shubhra S. Pasayat, Shuwen Xie, Surjava Sanyal, Swarnav Mukhopadhyay","submitted_at":"2024-07-14T22:04:35Z","abstract_excerpt":"Thin Si-doped Al-rich (Al>0.85) regrown Al(Ga)N layers were deposited on AlN on Sapphire template using metal-organic chemical vapor deposition (MOCVD) techniques. The optimization of the deposition conditions such as temperature, V/III ratio, deposition rate, and Si concentration resulted in a high charge carrier concentration (>$10^{15}/cm^{3}$) in the Si-doped Al-rich Al(Ga)N films. A pulsed deposition condition was employed to achieve a controllable Al composition greater than 95% and to prevent unintended Ga incorporation in the AlGaN material deposited using the close-coupled showerhead "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2407.10342","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2407.10342/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}