{"paper":{"title":"Vertical $\\beta$-Ga$_2$O$_3$ Schottky Diodes with Deep-Etch Field Termination using Plasma-free Ga-assisted Etching","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Ahmed Ibreljic, Anhar Bhuiyan, Saleh Ahmed Khan","submitted_at":"2026-06-27T14:29:42Z","abstract_excerpt":"A deep-etch field termination strategy using a Ga-assisted plasma-free etching technique in a low-pressure chemical vapor deposition (LPCVD) system is demonstrated for $\\beta$-Ga$_2$O$_3$ Schottky barrier diodes (SBDs). The thermally activated etching method provides a plasma-free approach for forming deep mesa terminations while maintaining excellent device integrity. The fabricated diodes exhibit excellent forward conduction characteristics with a turn-on voltage of 1.14~V, a Schottky barrier height (SBH) of 1.15~eV, an ideality factor of 1.20, and a specific on-resistance of 3.72~m$\\Omega\\c"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.28942","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.28942/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}