{"paper":{"title":"Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Christyves Chevallier (LMOPS), Fr\\'ed\\'eric Genty (LMOPS), Joel Jacquet (LMOPS), Nicolas Fressengeas (LMOPS)","submitted_at":"2012-05-03T06:55:01Z","abstract_excerpt":"A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared ({\\lambda} = 2.65 $\\mu$m). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the grating parameters while keeping large and shallow grating pattern. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances. The final mirror exhibits large high reflectivity bandwidth with a polarization selectivity and several percent of tolerance on the grating dimensions."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1205.0630","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}