{"paper":{"title":"Hydrodynamic and Solid Mechanics Analysis of Capillary Force-Induced Mold Deformation in Sub-10 nm UV Nanoimprint Lithography","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Jingxuan Cai, Wen-Di Li","submitted_at":"2018-11-13T04:51:27Z","abstract_excerpt":"A model has been developed to study the dynamic filling process and to investigate the capillary force-induced deformation of nanostructures on the imprint mold during ultraviolet nanoimprint lithography (UV-NIL) down to sub-10 nm resolution. The dynamic behavior of resist filling with varied physical parameters was investigated by a hydrodynamic model. The capillary force-induced deformation of mold structures was modeled using beam bending mechanics for both wetting and non-wetting mold structures. Theoretically calculated results were cross-validated with finite-element simulations using tw"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1811.05103","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}