{"paper":{"title":"High-quality superconducting {\\alpha}-Ta film sputtered on heated silicon substrate","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["quant-ph"],"primary_cat":"cond-mat.supr-con","authors_text":"Jiagui Feng, Kanglin Xiong, Yanfu Wu, Zengqian Ding","submitted_at":"2023-05-18T13:25:11Z","abstract_excerpt":"Intrigued by the discovery of the long lifetime in the {\\alpha}-Ta/Al2O3-based Transmon qubit, researchers recently found {\\alpha}-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method is to grow {\\alpha}-Ta film on a silicon substrate compatible with industrial manufacturing. Here we report the {\\alpha}-Ta film sputter-grown on Si (100) with a low-loss superconducting TiNx buffer layer. The {\\alpha}-Ta film with a large growth temperature window has a good crystalline c"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2305.10957","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2305.10957/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}