{"paper":{"title":"Squeeze film absolute pressure sensors with sub-millipascal sensitivity","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Aur\\'elien Dantan, Henrik B. Pedersen, Mohsen Salimi, Robin V. Nielsen","submitted_at":"2023-12-19T07:53:04Z","abstract_excerpt":"We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ultrathin (50 nm), large area (0.25 mm2) films, suspended parallel to each other and forming an ultrashort (500 nm), open cavity. The compression of a gas in this cavity leads to a strong squeeze film force, resulting in an increase in the membrane mechanical resonance frequencies which is directly proportional to the absolute gas pressure. These sandwiches show a record high responsitivity of >300 Hz/Pa in terms of sq"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2312.11915","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2312.11915/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}