{"paper":{"title":"Crack-free Sc$_{x}$Al$_{1-x}$N(000$\\bar{1}$) layers grown on Si(111) by plasma-assisted molecular beam epitaxy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Duc V. Dinh, Oliver Brandt, Zhuohui Chen","submitted_at":"2024-11-22T11:50:18Z","abstract_excerpt":"We investigate the synthesis of 340-nm-thick Sc$_x$Al$_{1-x}$N layers with $0 \\leq x \\leq 0.35$ on AlN-buffered Si(111) by plasma-assisted molecular beam epitaxy. We employ an AlN nucleation layer under conditions giving rise to single-domain N-polar [(000$\\bar{1}$)-oriented] layers, as demonstrated by the ($3 \\times 3$) pattern observed in reflection high-energy electron diffraction and confirmed by KOH etching. The subsequent growth of pure wurtzite Sc$_x$Al$_{1-x}$N layers with $x \\leq 0.1$ is feasible at temperatures $\\leq$ 740{\\deg}C. However, layers with $x \\geq 0.2$ grown at 740{\\deg}C "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2411.14872","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2411.14872/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}