{"paper":{"title":"Enhanced electron-beam lithography to reduce the frequency scatter of 200-400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["astro-ph.IM"],"primary_cat":"physics.ins-det","authors_text":"A. Endo, D. J. Thoen, J. J. A. Baselmans, K. Karatsu, L. G. G. Olde Scholtenhuis, L. H. Martin, S. Vollebregt","submitted_at":"2026-06-19T11:44:54Z","abstract_excerpt":"Integrated superconducting spectrometers (ISSs) provide the instantaneous bandwidth, sensitivity, and scalable architecture for large-scale spectroscopic surveys in submillimeter-wave astronomy and cosmology. However, the accuracy with which the resonant frequencies of superconducting microstrip band pass filters can be spaced, has limited the spectral resolution for these spectrometers with continuous spectral coverage to $\\frac{F}{\\Delta F} < 500$. The origin of this frequency scatter has been largely unknown. In this work, we demonstrate a four-fold improvement in the frequency spacing of s"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.21348","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.21348/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}