{"paper":{"title":"Self-Focusing Control for Depth-Precise Wafer Slicing of 4H-SiC in Femtosecond Laser Processing","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mtrl-sci","physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Dong Hee Kang, Jae-Hak Lee, Jaeseung Lim, Jihoon Jeong, Mishfaqur Rahman, Seongheum Han, Seungman Kim","submitted_at":"2026-08-04T15:24:12Z","abstract_excerpt":"4H-SiC has emerged as a third-generation chip material because its superior thermal conductivity and high breakdown field enable the material to achieve high power density and higher switching frequencies in power-electronics applications. As chip architectures evolve toward 3D and heterogeneous integration, the mechanical and thermal design space tightens while yield risks grow. In particular, advanced packages require mid-process wafer thinning to < 100 $\\mu$m to shorten interconnects and control thermo-mechanical stress. Femtosecond laser slicing for 4H-SiC wafers offers a non-contact proce"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.03814","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.03814/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}