{"paper":{"title":"Wide Stiffness Range Cavity Optomechanical Sensors for Atomic Force Microscopy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Houxun Miao, Kartik Srinivasan, Vladimir Aksyuk, Yuxiang Liu","submitted_at":"2012-05-14T22:59:53Z","abstract_excerpt":"We report on progress in developing compact sensors for atomic force microscopy (AFM), in which the mechanical transducer is integrated with near-field optical readout on a single chip. The motion of a nanoscale, doubly-clamped cantilever was transduced by an adjacent high quality factor silicon microdisk cavity. In particular, we show that displacement sensitivity on the order of 1 fm/(Hz)^(1/2) can be achieved while the cantilever stiffness is varied over four orders of magnitude (\\approx 0.01 N/m to \\approx 290 N/m). The ability to transduce both very soft and very stiff cantilevers extends"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1205.3215","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}