{"paper":{"title":"An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["math-ph","math.MP","physics.flu-dyn"],"primary_cat":"physics.plasm-ph","authors_text":"Kun Xu, Yue Zhang, Yufeng Wei, Yuze Zhu","submitted_at":"2026-07-20T16:03:39Z","abstract_excerpt":"Fast and accurate fluid simulation of radio-frequency capacitively coupled plasmas (RF CCPs) is of great importance for the iterative design and parameter optimization of modern plasma reactors. This study presents the first successful extension of the time-domain harmonic balance (HB) method to a fully coupled drift-diffusion-Poisson system with complete electron-energy transport for RF plasma simulations. To resolve the severe numerical stiffness arising from highly nonlinear energy-dependent kinetics and dense phase-coupling, a highly efficient spatiotemporal operator-splitting strategy is "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2607.18103","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2607.18103/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}