{"paper":{"title":"Time-resolved study of carbonization and growth of ultrathin 3C-SiC on Si(111) under ultra-high vacuum","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Eva Kol\\'ibalov\\'a, Jan Michali\\v{c}ka, Josef Pol\\v{c}\\'ak, Michal Hor\\'ak, Mojdeh Fallahpour, Petr B\\'abor, Pranjali Jadhao, Stanislav Voborn\\'y, Tom\\'a\\v{s} \\v{S}ikola","submitted_at":"2026-08-10T11:04:20Z","abstract_excerpt":"The early-stage formation of silicon carbide (SiC) on Si(111) by ethylene exposure under ultra-high vacuum (UHV) was investigated to resolve the time-dependent chemical and morphological evolution of an ultrathin layer. Clean Si(111) substrates were exposed to C$_2$H$_4$ at 800 {\\deg}C for 2 min to 4 h, and the surfaces followed by in-situ X-ray photoelectron spectroscopy (XPS) and ex-situ AFM, SEM, AES, SIMS and TEM. Si 2p and C 1s peak analysis shows the progressive conversion of elemental silicon into a carbidic Si-C phase, the SiC fraction overtaking the elemental component between 120 and"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.09431","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.09431/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}