{"paper":{"title":"Ferroelectric HfO$_2$ Memory Transistors with High-$\\kappa$ Interfacial Layer and Write Endurance Exceeding $10^{10}$ Cycles","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Ava Jiang Tan, Chenming Hu, Jong-Ho Bae, Li-Chen Wang, Sayeef Salahuddin, Yu-Hung Liao","submitted_at":"2021-03-16T02:28:15Z","abstract_excerpt":"We demonstrate ferroelectric (FE) memory transistors on a crystalline silicon channel with endurance exceeding $10^{10}$ cycles. The ferroelectric transistors (FeFETs) incorporate a high-$\\kappa$ interfacial layer (IL) of thermally grown silicon nitride (SiN$_x$) and a thin 4.5 nm layer of Zr-doped FE-HfO$_2$ on a $\\sim$30 nm SOI channel. The device shows a $\\sim$ 1V memory window in a DC sweep of just $\\pm$ 2.5V, and can be programmed and erased with voltage pulses of $V_G= \\pm$ 3V at a pulse width of 250 ns. The device also shows very good retention behavior. These results indicate that appr"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2103.08806","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2103.08806/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}