{"paper":{"title":"MEMS Vapor Cells-based Rydberg-atom Electrometry Toward Miniaturization and High Sensitivity","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["quant-ph"],"primary_cat":"physics.atom-ph","authors_text":"Beibei Sun, Ju Guo, Libo Zhao, Mingzhi Yu, Pan Chen, Ping Yang, Qijing Lina, Yanbin Wang, Yao Chen, Yintao Ma","submitted_at":"2025-09-02T03:14:30Z","abstract_excerpt":"Rydberg-atom electrometry, as an emerging cutting-edge technology, features high sensitivity, broad bandwidth, calibration-free operation, and beyond. However, until now the key atomic vapor cells used for confining electric field-sensitive Rydberg atoms nearly made with traditional glass-blown techniques, hindering the miniaturization, integration, and batch manufacturing. Here, we present the wafer-level MEMS atomic vapor cells with glass-silicon-glass sandwiched structure that are batch-manufactured for both frequency stability and electric field measurement. We use specially customized ult"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2509.01911","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2509.01911/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}