{"paper":{"title":"Stochastic dynamics simulation of the focused electron beam induced deposition process","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["physics.data-an"],"primary_cat":"physics.comp-ph","authors_text":"Alexey Prosvetov, Andrey V. Solov'yov, Gennady Sushko, Ilia A. Solov'yov","submitted_at":"2025-06-22T20:34:07Z","abstract_excerpt":"This work reports on the development of a new approach to the multiscale computational modelling of the focused electron beam-induced deposition (FEBID), realised using the advanced software packages: MBN Explorer and MBN Studio. Our approach is based on stochastic dynamics (SD), which describes the probabilistic evolution of complex systems. The parameters for the new SD-based FEBID model were determined using molecular dynamics (MD) simulations. A new methodology was developed for this purpose and is described in detail. This methodology can be applied to many other case studies of the dynam"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2506.18163","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2506.18163/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}