{"paper":{"title":"Optimisation of NbN thin films on GaAs substrates for in-situ single photon detection in structured photonic devices","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"cond-mat.supr-con","authors_text":"Andrej Voss, Fabian Flassig, G\\\"unther Reithmaier, Jonathan Finley, J\\\"org Senf, Rudolf Gross, Stefan Lichtmannecker, Thorsten Reichert","submitted_at":"2012-12-10T11:40:42Z","abstract_excerpt":"We prepare NbN thin films by DC magnetron sputtering on [100] GaAs substrates, optimise their quality and demonstrate their use for efficient single photon detection in the near-infrared. The interrelation between the Nb:N content, growth temperature and crystal quality is established for 4-22nm thick films. Optimised films exhibit a superconducting critical temperature of 12.6\\pm0.2K for a film thickness of 22\\pm0.5nm and 10.2\\pm0.2K for 4\\pm0.5nm thick films. The optimum growth temperature is shown to be ~475{\\deg}C reflecting a trade-off between enhanced surface diffusion, which improves th"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1212.2038","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}