{"paper":{"title":"Over 6 $\\mu$m thick MOCVD-grown Low-Background Carrier Density (10$^{15}$ cm$^{-3}$) High-Mobility (010) $\\beta$-Ga$_2$O$_3$ Drift Layers","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Arkka Bhattacharyya, Carl Peterson, Kittamet Chanchaiworawit, Saurav Roy, Sriram Krishnamoorthy, Steve Rebollo, Yizheng Liu","submitted_at":"2023-11-24T02:38:31Z","abstract_excerpt":"This work reports high carrier mobilities and growth rates, simultaneously in low unintentionally-doped UID (10$^{15}$ cm$^{-3}$) MOCVD-grown thick $\\beta$-Ga$_2$O$_3$ epitaxial drift layers, with thicknesses reaching up to 6.3 $\\mu$m, using triethylgallium (TEGa) as a precursor. Record high room temperature Hall mobilities of 187-190 cm$^2$/Vs were measured for background carrier density values of 2.4 - 3.5$\\times$10$^{15}$ cm$^{-3}$ grown at a rate of 2.2 $\\mu$m/hr. A controlled background carrier density scaling from 3.3$\\times$10$^{16}$ cm$^{-3}$ to 2.4$\\times$10$^{15}$ cm$^{-3}$ is demons"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2311.14253","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2311.14253/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}