{"paper":{"title":"Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Aranka Derzsi, Edmund Schuengel, Julian Schulze, Mate Vass, Satoshi Hamaguchi, Zoltan Donko","submitted_at":"2018-09-18T14:48:17Z","abstract_excerpt":"We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as well as the possibilities of the independent control of the ion flux and the ion energy are analysed for different types of excitation: single- and classical dual-frequency, as well as valleys- and sawtooth-type waveforms. The studies are based on kinetic, particle-based simulations that reveal the physics of these discharges in great details. The conditions cover weakly collisional to highly collisional domains"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1809.06779","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}