{"paper":{"title":"Bolometric arrays and infrared sensitivity of VO2 films with varying stoichiometry","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mes-hall","authors_text":"C. H. Lin, R. L. Smith, S. Min, S. Roberts, Y. Hu","submitted_at":"2017-02-17T01:03:04Z","abstract_excerpt":"Here we propose a linear microbolometric array based on VOx thin films. The linear microbolometric array is fabricated by using micromachining technology, and its thermo-sensitive VOx thin film has excellent infrared response spectrum and TCR characteristics. Nano-scale VOx thin films deposited on SiO2/Si substrates were obtained by e-beam vapor deposition. The VOx films were then annealed at temperatures between 300 to 500 C with various deposition duration time. The crystal structures and microstructures were examined by XRD, SEM and ESCA. These films showed a predominant phase of rhombohedr"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1702.06412","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}