{"paper":{"title":"Optimization of EUV output by experimentally validated radiation-hydrodynamic simulations across a broad laser parameter space","license":"http://creativecommons.org/licenses/by-nc-sa/4.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Akira Sasaki, Atsushi Sunahara, Katsunobu Nishihara, Kentaro Tomita, Masashi Yoshimura, Nozomi Tanaka, Shinsuke Fujioka, Tomoyuki Johzaki, Yuji Takagi, Yu Yamamoto","submitted_at":"2026-06-04T09:48:31Z","abstract_excerpt":"Practical requirements such as improving wall-plug efficiency and reducing system footprint have become increasingly important with the introduction of extreme ultraviolet (EUV) lithography into high-volume semiconductor manufacturing. These demands motivate the development of solid-state mid-infrared lasers as alternatives to current CO2 lasers. Systematic exploration of laser-to-EUV conversion efficiency (EUV-CE) over a broad parameter space is essential when altering the drive laser's wavelength, because the EUV-CE depends on the laser parameters in a complex manner. In this work, we perfor"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.05948","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.05948/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}