{"paper":{"title":"In-situ growth optimization in focused electron-beam induced deposition","license":"http://creativecommons.org/licenses/by/3.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Christian H. Schwalb, Marcel Winhold, Michael Huth, Paul M. Weirich","submitted_at":"2013-10-14T17:07:53Z","abstract_excerpt":"We present the application of an evolutionary genetic algorithm for the in-situ optimization of nanostructures prepared by focused electron-beam-induced deposition. It allows us to tune the properties of the deposits towards highest conductivity by using the time gradient of the measured in-situ rate of change of conductance as fitness parameter for the algorithm. The effectiveness of the procedure is presented for the precursor W(CO)6 as well as for post-treatment of Pt-C deposits obtained by dissociation of MeCpPt(Me)3. For W(CO)6-based structures an increase of conductivity by one order of "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1310.3749","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}