{"paper":{"title":"Capacity Planning for Cluster Tools in the Semiconductor Industry","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cs.DS","authors_text":"Martin Romauch, Richard F. Hartl","submitted_at":"2016-05-03T14:07:32Z","abstract_excerpt":"This paper proposes a new model for Cluster-tools with two load locks. Cluster-tools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the Cluster-tool's mainframe. Usually there are two of them available. Each lot being processed, is dedicated to a single load-lock. Therefore at most two different lots (with possibly different processing times and qualification) can be processed simultaneously. This restriction is one of the major potential bottlenecks.\n  Capacity planning is one of the possible applications f"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1605.00914","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}