{"paper":{"title":"X-ray mirror figure correction using differential deposition","license":"http://creativecommons.org/publicdomain/zero/1.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"A. Vivo, Ch. Morawe, F. Perrin, R. Barrett, S. Labour\\'e","submitted_at":"2025-06-02T08:06:12Z","abstract_excerpt":"The surface figure of x-ray mirrors can be improved by differential deposition of thin films. To achieve the required corrections, WSi2 layers of variable thickness were deposited through beam-defining apertures of different openings. The substrates were moved in front of the particle source with specific velocity profiles that were calculated with a deconvolution algorithm. Two different DC magnetron sputter systems were used to investigate the correction process. Height errors were evaluated before and after each iteration using off-line visible light surface metrology. Four 300 mm long flat"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2506.01409","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2506.01409/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}