{"paper":{"title":"Wafer Map Defect Classification Using Autoencoder-Based Data Augmentation and Convolutional Neural Network","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cs.AI","eess.IV"],"primary_cat":"cs.CV","authors_text":"Bin-Bin Jia, Er-Chao Li, Hong-Qiang Yang, Yin-Yin Bao","submitted_at":"2024-11-17T10:19:54Z","abstract_excerpt":"In semiconductor manufacturing, wafer defect maps (WDMs) play a crucial role in diagnosing issues and enhancing process yields by revealing critical defect patterns. However, accurately categorizing WDM defects presents significant challenges due to noisy data, unbalanced defect classes, and the complexity of failure modes. To address these challenges, this study proposes a novel method combining a self-encoder-based data augmentation technique with a convolutional neural network (CNN). By introducing noise into the latent space, the self-encoder enhances data diversity and mitigates class imb"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2411.11029","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2411.11029/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}