{"paper":{"title":"Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.optics"],"primary_cat":"cond-mat.mes-hall","authors_text":"Alexandre Bourassa, Christoph Reinhardt, Jack C. Sankey, Tina M\\\"uller","submitted_at":"2015-11-05T15:07:43Z","abstract_excerpt":"In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here we report wafer-scale batch fabrication and characterization of high-aspect-ratio, nanogram-scale Si$_3$N$_4$ \"trampolines\" having quality factors above $4 \\times 10^7$ and ringdown times exceeding five minutes (1 mHz linewidth). We measure a thermally limited force noise sensitivity of 16.2$\\pm$0.8 aN/Hz$^{1/2}$ at room temperature, with a spring constant ($\\sim$1 N/m) 2-5 orders of magnitude larger than t"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1511.01769","kind":"arxiv","version":4},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}