{"paper":{"title":"Investigation of the deposition of $\\alpha$-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"physics.app-ph","authors_text":"Boyi Zhou, Haolin Jia, Jiagui Feng, Kanglin Xiong, Lina Yang, Shuming Li, Tao Wang, Yanfu Wu, Zengqian Ding","submitted_at":"2023-06-16T00:54:38Z","abstract_excerpt":"Polycrystalline {\\alpha}-tantalum (110) films deposited on c-plane sapphire substrate by sputtering are used in superconducting qubits nowadays. However, these films always occasionally form other structures, such as {\\alpha}-tantalum (111) grains and \\b{eta}-tantalum grains. To improve the film quality, we investigate the growth of {\\alpha}-tantalum (110) films on a-plane sapphire substrate under varying conditions by molecular beam epitaxy technology. The optimized {\\alpha}-tantalum (110) film is single crystal, with a smooth surface and atomically flat metal-substrate interface. The film wi"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2306.09566","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2306.09566/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"}