Phase Analysis of Thin Film Oxide Systems by AES and EELS

A.G. Znamenskii; V.A. Marchenko; V.G. Beshenkov; V.T. Volkov

arxiv: cond-mat/9812411 · v1 · submitted 1998-12-29 · ❄️ cond-mat.mtrl-sci

Phase Analysis of Thin Film Oxide Systems by AES and EELS

V.G. Beshenkov , V.A. Marchenko , V.T. Volkov , A.G. Znamenskii This is my paper

classification ❄️ cond-mat.mtrl-sci

keywords eelssystemsal2o3electronfilmmethodsoxidephase

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Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) in a reflection mode are compared as the methods for phase composition investigation of thin film oxide systems by ion profiling. As an example, the Al/Al2O3/Si and YBa2Cu3O7/CeO2/Al2O3 systems are considered. The adaptation of applied statistics methods for AES and EELS data treatment is discussed.

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Phase Analysis of Thin Film Oxide Systems by AES and EELS

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