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arxiv 2307.00736 v2 pith:QS7FCGNZ submitted 2023-07-03 physics.optics physics.app-ph

Ultra-high Q alumina optical microresonators in the UV and blue bands

classification physics.optics physics.app-ph
keywords aluminabandsfactormicroresonatorsopticalphotonicstimesachieved
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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UV and visible photonics enable applications ranging from spectroscopic sensing to communication and quantum information processing. Photonics structures in these wavelength regimes, however, tend to experience higher loss than their IR counterpart. Particularly in the near-UV band, on-chip optical microresonators have not yet achieved a quality factor beyond 1 million. Here we report ultra-low-loss photonic waveguides and resonators patterned from alumina thin films prepared by a highly scalable atomic layer deposition process. We demonstrate ultra high Q factor of 1.5$\,\times\,$10$^6$ at 390nm, a record value at UV bands, and 1.9$\,\times\,$10$^6$ at 488.5nm.

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