{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2012:2CXYJREZUIEFKPYDZ6TVUAM763","short_pith_number":"pith:2CXYJREZ","schema_version":"1.0","canonical_sha256":"d0af84c499a208553f03cfa75a019ff6d7ceb502594d0ea6be760071b5b1e9e3","source":{"kind":"arxiv","id":"1205.3153","version":1},"attestation_state":"computed","paper":{"title":"Etch Induced Microwave Losses in Titanium Nitride Superconducting Resonators","license":"http://creativecommons.org/licenses/publicdomain/","headline":"","cross_cats":[],"primary_cat":"cond-mat.supr-con","authors_text":"David P. Pappas, David S. Wisbey, Jeffrey S. Kline, Jiansong Gao, Martin Sandberg, Martin Weides, Michael R. Vissers","submitted_at":"2012-05-14T19:56:05Z","abstract_excerpt":"We have investigated the correlation between the microwave loss and patterning method for coplanar waveguide titanium nitride resonators fabricated on Si wafers. Three different methods were investigated: fluorine- and chlorine-based reactive ion etches and an argon-ion mill. At high microwave probe powers the reactive etched resonators showed low internal loss, whereas the ion-milled samples showed dramatically higher loss. At single-photon powers we found that the fluorine-etched resonators exhibited substantially lower loss than the chlorine-etched ones. We interpret the results by use of n"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1205.3153","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.supr-con","submitted_at":"2012-05-14T19:56:05Z","cross_cats_sorted":[],"title_canon_sha256":"309d1cf0352336bba59a4f6b7ae86ab281a20530dc266a83dcf494306c3d3212","abstract_canon_sha256":"72d46e19b3ce988530340865d214e110e70113852adb0e9c3e01514e4d7a37e9"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T01:22:49.247207Z","signature_b64":"ctkCwIP7iRM32mnMZ+EJHCVmxiDLCph6M2iiWyD+B9FiEqZbr6SprKRyY53Fj2XLLxdPLA+CSmeFYpDD0TPQDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"d0af84c499a208553f03cfa75a019ff6d7ceb502594d0ea6be760071b5b1e9e3","last_reissued_at":"2026-05-18T01:22:49.246414Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T01:22:49.246414Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Etch Induced Microwave Losses in Titanium Nitride Superconducting Resonators","license":"http://creativecommons.org/licenses/publicdomain/","headline":"","cross_cats":[],"primary_cat":"cond-mat.supr-con","authors_text":"David P. Pappas, David S. Wisbey, Jeffrey S. Kline, Jiansong Gao, Martin Sandberg, Martin Weides, Michael R. Vissers","submitted_at":"2012-05-14T19:56:05Z","abstract_excerpt":"We have investigated the correlation between the microwave loss and patterning method for coplanar waveguide titanium nitride resonators fabricated on Si wafers. Three different methods were investigated: fluorine- and chlorine-based reactive ion etches and an argon-ion mill. At high microwave probe powers the reactive etched resonators showed low internal loss, whereas the ion-milled samples showed dramatically higher loss. At single-photon powers we found that the fluorine-etched resonators exhibited substantially lower loss than the chlorine-etched ones. We interpret the results by use of n"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1205.3153","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1205.3153","created_at":"2026-05-18T01:22:49.246532+00:00"},{"alias_kind":"arxiv_version","alias_value":"1205.3153v1","created_at":"2026-05-18T01:22:49.246532+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1205.3153","created_at":"2026-05-18T01:22:49.246532+00:00"},{"alias_kind":"pith_short_12","alias_value":"2CXYJREZUIEF","created_at":"2026-05-18T12:26:50.516681+00:00"},{"alias_kind":"pith_short_16","alias_value":"2CXYJREZUIEFKPYD","created_at":"2026-05-18T12:26:50.516681+00:00"},{"alias_kind":"pith_short_8","alias_value":"2CXYJREZ","created_at":"2026-05-18T12:26:50.516681+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763","json":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763.json","graph_json":"https://pith.science/api/pith-number/2CXYJREZUIEFKPYDZ6TVUAM763/graph.json","events_json":"https://pith.science/api/pith-number/2CXYJREZUIEFKPYDZ6TVUAM763/events.json","paper":"https://pith.science/paper/2CXYJREZ"},"agent_actions":{"view_html":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763","download_json":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763.json","view_paper":"https://pith.science/paper/2CXYJREZ","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1205.3153&json=true","fetch_graph":"https://pith.science/api/pith-number/2CXYJREZUIEFKPYDZ6TVUAM763/graph.json","fetch_events":"https://pith.science/api/pith-number/2CXYJREZUIEFKPYDZ6TVUAM763/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763/action/timestamp_anchor","attest_storage":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763/action/storage_attestation","attest_author":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763/action/author_attestation","sign_citation":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763/action/citation_signature","submit_replication":"https://pith.science/pith/2CXYJREZUIEFKPYDZ6TVUAM763/action/replication_record"}},"created_at":"2026-05-18T01:22:49.246532+00:00","updated_at":"2026-05-18T01:22:49.246532+00:00"}